Editing Log
.
J. Vac. Sci. Technol. B 16, 2134-2153 (1998) ,
“What can electron paramagnetic resonance tell us about the Si/SiO2 system?”, P. M. Lenahan, J. F. Conley, Jr.
BPSG PSG Si SiO2| EDMR EPR electric-field-effect electrical-meas. etching gamma-irradiation| 10B 11B 1H 29Si 2D 31P BOHC Boron Deuterium E' E'-delta H(I) Hydrogen Nb Nitrogen Oxygen P1 P2 P4 POHC Pb Pb0 Pb1 Phosphorus Silicon amorphous complex(=3) dangling-bond device dielectric interface pair(=2) | last update: Takahide Umeda
- last updated at 2006-10-31 18:24:16
- 2006-10-31 18:24:16 Takahide Umeda, University of Tsukuba, others Si | EDMR EPR Electrical_measurements electric_field etching gamma_irradiation | 10B 11B 1H 29Si 2D 31P BOHC BPSG Boron Deuterium E' Hydrogen Nb Nitrogen Oxygen P1 P2 P4 POHC PSG Pb Pb0 Pb1 Phosphorus SiO2 Silicon amorphous complex(=3) dangling_bond device dielectric interface pair(=2) E'-delta H(I)
- 2006-10-31 10:44:17 Takahide Umeda, University of Tsukuba, others Si | EPR Electrical_measurements EDMR electric_field etching gamma_irradiation | E' Pb SiO2 interface amorphous Pb0 Pb1 Nb P1 P2 P4 POHC BOHC Boron Phosphorus 31P 10B 11B 29Si Silicon Oxygen 1H 2D Hydrogen Deuterium Nitrogen dangling_bond pair(=2) complex(=3) dielectric device BPSG PSG
- 2006-03-20 15:23:54 Takao Imai, University of Tsukuba
All papers (3399)
Updated at 2010-07-20 16:50:39
Updated at 2010-07-20 16:50:39
(view as: tree
,
cloud
)
1329 | untagged |
Materials
(111 tags)
219
286
89
24
36
851
26
238
183
139
Others(101 tags)
1
10
2
1
4
1
4
1
1
2
4
1
5
1
1
3
1
1
2
3
2
4
1
1
3
2
1
1
1
3
1
1
1
1
1
4
11
1
1
2
1
1
2
6
1
2
6
8
1
2
4
1
1
1
3
2
1
4
2
1
1
9
26
1
1
4
1
1
1
2
1
1
1
1
1
13
1
2
3
2
7
1
1
1
1
11
1
1
1
1
1
1
1
1
1
1
3
1
6
Technique
(46 tags)
19
7
67
71
1
118
1
33
1058
2
12
1
33
105
36
4
37
31
111
22
23
3
19
261
43
Details
(591 tags)
Bond(35 tags)
1
1
1
1
1
1
1
3
1
10
1
6
2
2
2
2
11
1
1
4
1
2
6
3
1
3
4
22
1
5
2
1
4
3
1
Defect(interstitial)(18 tags)
2
1
2
12
1
1
4
0
1
16
4
2
11
1
4
20
3
5
Defect-type(19 tags)
58
20
37
18
7
57
81
18
111
4
14
256
16
Element(65 tags)
18
9
20
4
56
1
2
131
8
12
12
15
16
7
6
15
15
24
10
4
11
142
7
0
30
4
20
51
1
6
1
7
85
4
165
57
8
3
1
0
4
234
4
5
2
2
1
3
4
4
16
24
Energy(8 tags)
15
52
35
24
14
10
7
Isotope(56 tags)
19
7
2
1
2
4
9
6
40
13
5
5
7
1
5
4
2
88
1
27
1
2
2
1
1
2
1
7
2
11
6
1
2
1
1
2
1
4
1
5
4
1
2
1
2
3
2
1
1
1
1
1
1
1
4
1
Label(303 tags)
2
1
5
1
2
3
4
2
3
2
1
1
2
1
1
1
5
1
1
1
4
1
2
2
1
1
1
1
1
1
1
2
1
3
3
2
2
1
2
1
1
1
1
1
1
4
1
1
2
16
2
4
4
3
2
7
3
1
1
1
1
34
3
37
1
3
2
5
8
5
3
5
2
3
2
1
1
1
1
2
2
1
1
1
1
1
1
2
2
2
1
1
17
1
22
1
1
12
2
1
5
3
3
2
2
1
5
7
7
1
3
2
4
1
1
2
2
3
3
1
0
3
3
1
1
2
2
2
3
1
2
2
1
2
3
1
5
1
2
1
1
1
2
12
6
1
1
1
1
2
2
1
1
2
5
3
1
1
3
4
2
2
1
1
1
1
2
3
1
1
1
1
1
1
2
2
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
1
1
1
1
3
1
1
1
1
1
1
1
1
1
1
1
4
3
4
1
9
1
2
1
2
3
6
5
5
2
2
1
5
12
1
2
1
35
29
23
2
1
1
1
1
1
2
8
1
1
1
1
1
1
1
1
1
1
1
1
1
3
1
4
3
2
5
1
3
3
2
2
9
2
2
1
2
1
1
1
0
2
1
7
1
1
1
1
4
5
2
10
4
2
1
2
3
1
8
1
1
1
1
1
2
1
1
11
Sample(17 tags)
132
98
113
134
5
0
198
11
160
9
65
Spin(8 tags)
3
13
Symmetry(15 tags)
8
9
16
2
9
25
3
7
3
4
12
9