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ion-implantation TDD
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(Media and Technological Bases for Community Knowledge)
All papers (3399)
Updated at 2010-07-20 16:50:39
(view as: tree , cloud )
1329 untagged
Materials (111 tags)
219
+
diamond
286
+
GaAs
89
+
GaN
24
+
Ge
36
+
HfO2
851
+
Si
26
+
Si3N4
238
+
SiC
183
+
SiO2
139
+
ZnO
Others(101 tags)
1
+
AgCl
10
+
Al2O3
2
+
AlAs
1
+
AlGaInP
4
+
AlGaN
1
+
Ali
4
+
AlN
1
+
AsSe
1
+
B2O
2
+
B2O3
4
+
BaTiO3
1
+
BiMnO3
5
+
BN
1
+
BPSG
1
+
BTO
1
+
CaCu3Ti4O12
3
+
CaO
1
+
CdFeS
1
+
CdMnTe
2
+
CdO
3
+
CdS
2
+
CdSe
4
+
CdTe
1
+
CoO
1
+
Cr2O3
3
+
Cu2O
2
+
CuGaSe2
1
+
CuSe2
1
+
Er2O3
1
+
FeSi
19
+
fullerene/nanotube
3
+
Ga2O3
1
+
GaAlAs
1
+
GaAsSb
1
+
GaF2
1
+
GaInNAs
1
+
GaP
4
+
GeO2
11
+
graphite
1
+
HAp
1
+
He
2
+
HfO2,
1
+
HfSiO2
1
+
HgCdTe
2
+
In2O3
6
+
InAs
1
+
InAsSb
2
+
InGaN
6
+
InN
8
+
InP
1
+
InSb
2
+
KTaO3
4
+
LaAlO3
1
+
LaCuOSe
1
+
LaGaO3
1
+
Li2NH
3
+
LiAlO2
2
+
LiNbO3
1
+
LuAl3
4
+
MgO
2
+
MnO2
1
+
MnSi
1
+
MoO3
9
+
organic
26
+
others
1
+
P2O5
1
+
PbFCl
4
+
PbO
1
+
PbTe
1
+
PbZrO3
1
+
PrCaMnO3
2
+
PSG
1
+
PSN
1
+
PZT
1
+
RuO2
1
+
Sb2O3
1
+
SiB
13
+
SiGe
1
+
silicide
2
+
SnO2
3
+
SOI
2
+
SrCl2
7
+
SrTiO3
1
+
TaN
1
+
TeO2
1
+
ThO2
1
+
TiO
11
+
TiO2
1
+
V2O5
1
+
Vcu
1
+
Vse
1
+
WO3
1
+
Y2SiO5
1
+
Y3Al5O12
1
+
YbAl3
1
+
ZnCr2O4
1
+
ZnF2
1
+
ZnGeP2
3
+
ZnSe
1
+
ZnTe
6
+
ZrO2
Technique (46 tags)
1
+
Alpha-irradiation
19
+
CL/EL
7
+
CV
67
+
DLTS
71
+
EDMR
1
+
Effect
43
+
electric-field-effect
118
+
electrical-meas.
95
+
electron-irradiation
1
+
emission
33
+
ENDOR
1058
+
EPR
2
+
ESR
12
+
etching
1
+
Field
2
+
galanomagnetic
20
+
gamma-irradiation
33
+
HREM/TEM
105
-
ion-implantation
36
+
IR
2
+
mechanical-meas.
4
+
muSR
25
+
neutron-irradiation
1
+
neutron-spectroscopy
13
+
NMR/Mossbauer
9
+
nuclear-reaction
37
+
ODMR
22
+
optical-microscope/SEM
74
+
optical-spectroscopy
31
+
PAS
1
+
photocatalysis
111
+
PL
9
+
plastic-deformation
22
+
Raman
4
+
RHEED/LEED
23
+
SIMS
3
+
SQUID
19
+
STM/AFM/SPM
3
+
strain-meas.
23
+
stress/pressure_effects
261
+
Theory
128
+
thermal-meas./anneal-exp.
10
+
Thermoelectric/Seebeck
3
+
thermomagnetic
43
+
X-ray
16
+
XPS/UPS/Auger
Details (591 tags)
Bond(35 tags)
1
+
Al-O
1
+
As-As
1
+
As-Ga
1
+
As-N
1
+
As-O
1
+
B-D
1
+
B-F
3
+
B-H
1
+
B-O
10
+
C-C
1
+
C-D
6
+
C-H
2
+
C=C
2
+
Ga-N
2
+
Ga-O
2
+
Ge-O
11
+
H-H
1
+
Li-B
1
+
Li-O
4
+
N-H
1
+
N-N
2
+
N-O
6
+
O-H
3
+
O-O
1
+
P-O
3
+
Si-D
4
+
Si-F
22
+
Si-H
1
+
Si-N
5
+
Si-O
2
+
Si-Si
1
+
sp
4
+
sp2
3
+
sp3
1
+
V-H
Charge(9 tags)
38
+
+1
18
+
+2
16
+
+3
1
+
+4(more)
32
+
-1
9
+
-2
0
+
-3
0
+
-4(more)
48
+
0(neutral)
Defect(antisite)(6 tags)
2
+
Asga
1
+
Bn
11
+
Csi
0
+
Gaas
0
+
Sic
1
+
Zno
Defect(interstitial)(18 tags)
2
+
Ali
1
+
Asi
2
+
Bi
12
+
Ci
1
+
Cli
1
+
Coi
4
+
Fi
0
+
Gai
1
+
Hfi
16
+
Hi
4
+
Mni
2
+
Ni
11
+
Oi
1
+
Pbi
4
+
Pi
20
+
Sii
3
+
Tii
5
+
Zni
Defect(vacancy)(15 tags)
1
+
Vas
1
+
Vb
19
+
Vc
1
+
Vcl
1
+
Vf
4
+
Vga
5
+
Vge
1
+
Vin
3
+
Vn
1
+
Vna
32
+
Vo
1
+
Vp
2
+
Vpb
35
+
Vsi
6
+
Vzn
Defect-type(19 tags)
58
+
acceptor
20
+
aggregate
37
+
antisite
4
+
band-tail
25
+
bistable/metastable
18
+
carrier
7
+
DA-pair
82
+
dangling-bond
57
+
dislocation
81
+
donor
18
+
exciton
30
+
extended-defect
111
+
interstitial
8
+
negative-U
4
+
platelet
14
+
precipitate
12
+
stacking-fault
256
+
vacancy
16
+
void
Element(65 tags)
18
+
Aluminium
9
+
Antimony
20
+
Arsenic
3
+
Beryllium
4
+
Bismuth
56
+
Boron
1
+
Caesium
2
+
Calcium
131
+
Carbon
8
+
Chlorine
12
+
Chromium
12
+
Cobalt
15
+
Copper
16
+
Deuterium
1
+
Dysprosium
7
+
Erbium
6
+
Europium
15
+
Fluorine
3
+
Gadolinium
15
+
Gallium
24
+
Germanium
10
+
Gold
4
+
Hafnium
11
+
Helium
142
+
Hydrogen
7
+
Indium
0
+
Iridium
30
+
Iron
1
+
Lanthanum
4
+
Lead
20
+
Lithium
8
+
Magnesium
51
+
Manganese
1
+
Mercury
1
+
Molybdenum
6
+
Muonium
1
+
Neodymium
1
+
Neon
7
+
Nickel
85
+
Nitrogen
4
+
Osmium
165
+
Oxygen
5
+
Palladium
57
+
Phosphorus
8
+
Platinum
1
+
Praseodymium
3
+
Rhodium
1
+
Rubidium
1
+
Ruthenium
0
+
Scandium
4
+
Selenium
234
+
Silicon
4
+
Sodium
4
+
Strontium
5
+
Sulfur
2
+
Tantalum
1
+
Tellurium
2
+
Terbium
1
+
Thulium
3
+
Tin
4
+
Titanium
4
+
Tungsten
16
+
Vanadium
2
+
Ytterbium
24
+
Zinc
Energy(8 tags)
15
+
0-0.1eV
52
+
0.1-0.5eV
35
+
0.5-1.0eV
24
+
1.0eV~
14
+
2.0eV~
10
+
3.0eV~
7
+
4.0eV~
11
+
5.0eV~(larger)
Isotope(56 tags)
19
+
1H
7
+
2D
2
+
6Li
1
+
7Be
2
+
7Li
4
+
10B
9
+
11B
6
+
12C
40
+
13C
13
+
14N
5
+
15N
5
+
16O
7
+
17O
1
+
18F
5
+
18O
4
+
27Al
2
+
28Si
88
+
29Si
1
+
30Si
27
+
31P
1
+
31Si
2
+
32P
2
+
33S
1
+
35Cl
1
+
37Cl
2
+
47Ti
1
+
49Ti
7
+
51V
2
+
53Cr
11
+
55Mn
6
+
57Fe
1
+
61Ni
2
+
63Cu
1
+
64Cu
1
+
64Zn
2
+
65Cu
1
+
66Zn
4
+
67Zn
1
+
68Zn
5
+
69Ga
4
+
71Ga
1
+
73Ge
2
+
75As
1
+
77Se
2
+
119Sn
3
+
121Sb
2
+
123Sb
1
+
167Er
1
+
171Yb
1
+
173Yb
1
+
178W
1
+
181Ta
1
+
183W
1
+
195Pt
4
+
197Au
1
+
207Pb
Label(303 tags)
2
+
(C2)si
1
+
(C3)si
5
+
A
1
+
A0
2
+
A1
3
+
A2
4
+
A3
2
+
A4
3
+
A5
2
+
A6
1
+
A7
1
+
A8
2
+
A9
1
+
A10
1
+
A11
1
+
A13
5
+
A14
1
+
A15
1
+
A16
1
+
A17
4
+
A18
1
+
A109
2
+
AA1
2
+
AA2
1
+
AA3
1
+
AA4
1
+
AA5
1
+
AA6
1
+
AA7
1
+
AA8
1
+
AA9
2
+
AA10
1
+
AA11
3
+
AA12
3
+
AA13
2
+
AA14
2
+
AA15
1
+
AA16
2
+
AA17
1
+
AB1
1
+
AB2
1
+
AB3
1
+
AB4
1
+
Al
1
+
B2
4
+
B3
1
+
B5
1
+
BOHC
2
+
C60
16
+
D
2
+
D0X
4
+
D1
4
+
D2
3
+
D3
2
+
D4
1
+
DE1/2/3/4
1
+
DH1/2/3/4
7
+
DI
3
+
DII
1
+
DK1
1
+
DK2
1
+
DK3
1
+
DK4
34
+
DX
3
+
E
37
+
E'
1
+
E''
3
+
E'-alpha
2
+
E'-betha
5
+
E'-delta
8
+
E'-gamma
5
+
E'-type
3
+
E1
5
+
E1/E2
2
+
E2
3
+
E3
2
+
E4
1
+
E5
1
+
E6
1
+
E7
1
+
E8
2
+
ED1
2
+
ED2
1
+
ED3
1
+
EH1
1
+
EH2
1
+
EH3
1
+
EH4
1
+
EH5
2
+
EH6/7
2
+
EI1
2
+
EI2
1
+
EI3
1
+
EI4
17
+
EI5/6
1
+
EI7
22
+
EL2
1
+
EL3
1
+
EL6
12
+
EM
2
+
EX
1
+
F+
5
+
FnVm
3
+
G1
3
+
G2
2
+
G3
2
+
G4
1
+
G5
5
+
G6
7
+
G7
7
+
G8
1
+
G9
3
+
G10
2
+
G11
4
+
G12
1
+
G13
1
+
G14
2
+
G15
2
+
G16
3
+
G17
3
+
G18
1
+
G19
0
+
G21
3
+
G23
3
+
G24
1
+
G25
1
+
G26
2
+
G28
2
+
G29
2
+
GGA2
3
+
H(I)
1
+
H(II)
2
+
H1
2
+
H1/2/3
1
+
H4
2
+
H5
3
+
H8
1
+
H9
5
+
HEI1
1
+
HEI5/6
2
+
HEI9/10
1
+
HT3/4
1
+
HT5
1
+
HTC
2
+
I3
12
+
K
6
+
K1
1
+
K2
1
+
K3
1
+
K4
1
+
K7
2
+
KC1
2
+
KC2
1
+
KR1
1
+
KY1
2
+
Ky1/2/3
5
+
L1
3
+
L2
1
+
L3
1
+
L4
3
+
L5
4
+
L6
2
+
L7
2
+
L8
1
+
L9
1
+
L10
1
+
L11
1
+
L12
2
+
M1/M2
3
+
M3
1
+
M4
1
+
ME1
1
+
Nb
1
+
ND1
1
+
NIRIM1
1
+
NIRIM2
2
+
NL3
2
+
NL8
1
+
NL9
1
+
NL10
1
+
NL11
1
+
NL12
1
+
NL13
1
+
NL14
1
+
NL15
1
+
NL16
1
+
NL17
1
+
NL18
1
+
NL19
1
+
NL20
1
+
NL21
1
+
NL22
1
+
NL23
2
+
NL24
1
+
NL25
1
+
NL26
1
+
NL27
1
+
NL28
3
+
NL29
1
+
NL50
1
+
NL54
1
+
NL55
1
+
NL60
1
+
NL61
1
+
NL63
1
+
NL64
1
+
NL65
1
+
NV1
1
+
NV2
1
+
NV3
4
+
ODC
3
+
ODC(I)
4
+
ODC(II)
1
+
OH-
9
+
OHC
1
+
Oi-
2
+
Os1
1
+
OS1
2
+
Os2
3
+
P
6
+
P1
5
+
P2
5
+
P3
2
+
P4
2
+
P4+
1
+
P5
5
+
P6
12
+
P6/7
1
+
P12
2
+
Pa
1
+
PA1
35
+
Pb
29
+
Pb0
23
+
Pb1
2
+
PbC
1
+
Pc
1
+
PK1
1
+
PK2
1
+
PK4
1
+
PO4
2
+
POHC
8
+
POR
1
+
Ps0
1
+
Ps1
1
+
PV1
1
+
Q
1
+
R
1
+
R4/W6
1
+
R5
1
+
RCA1
1
+
RCA2
1
+
RCA3
1
+
RCA4
1
+
RD1/2
1
+
RD4
3
+
S
1
+
S0
4
+
S1
3
+
S1a
2
+
S1b
5
+
S2
1
+
S4
3
+
SI1
3
+
SI2
2
+
SI3
2
+
SI4
9
+
SI5
2
+
SI7
2
+
SI8
1
+
SI9
2
+
SL1
1
+
SL2
1
+
SL5
1
+
SO4
0
+
STE
2
+
STH
1
+
T
7
+
T1
1
+
T2
1
+
T3
1
+
T4
1
+
T5
4
+
TD
5
-
TDD
2
+
Tv1/3a
10
+
Tv2a
4
+
U
2
+
UD1
1
+
UD2
2
+
UD3
3
+
V1/2/3
1
+
VH0
8
+
Vsi-
1
+
Vzn-
1
+
Vzn0
1
+
W1
1
+
W2
1
+
W3
2
+
X
1
+
Y
1
+
Z
11
+
Z1/2
1
+
[(C2)si]2
Orbital(11 tags)
1
+
As3d
3
+
C2p
1
+
Co3d
2
+
Ga3d
5
+
Hf4f
3
+
Mn3d
4
+
N1s
3
+
O1s
1
+
O2s
4
+
Si2p
1
+
Zn2p
Sample(17 tags)
132
+
amorphous
98
+
device
113
+
dielectric
11
+
ferroelectric
5
+
insulator
134
+
interface
8
+
intrinsic
5
+
liquid
0
+
metal
44
+
micro/nanocrystal
198
+
n-type
40
+
nanostructure
11
+
organic
160
+
p-type
9
+
porous
28
+
semi-insulating
65
+
surface
Size(4 tags)
51
+
cluster(>3)
50
+
complex(=3)
61
+
mono(=1)
155
+
pair(=2)
Spin(8 tags)
5
+
antiferromagnetic
12
+
exchange-effect
25
+
ferromagnetic
3
+
magnetoresistance
20
+
motional-effect
3
+
quartet
16
+
spin-relaxation
13
+
triplet
Symmetry(15 tags)
8
+
axial
9
+
C1
16
+
C1h
2
+
C2h
9
+
C2v
25
+
C3v
3
+
cubic
7
+
D2d
3
+
D3d
9
+
monoclinic
9
+
orthorhombic
4
+
Td
4
+
tetragonal
12
+
triclinic
9
+
trigonal
unbundled(2 tags)
7
+
NBTI
10
+
NRTI


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