Editing Log
.
Proc. SPIE 6020, 60203D (2005) ,
“Effect of radio frequency bias on the optical and structural properties of nanocrystalline SiC films deposited by helicon wave plasma enhanced chemical vapor deposition”, Wei Yu, Chunsheng Wang, Wanbing Lu, Shuangkui Cui, Guangsheng Fu
- last updated at 2006-03-08 22:23:13
- 2006-03-08 22:23:13 Tomoyo Inde, University of Tsukuba
- 2006-02-24 13:26:57 Tomoyo Inde, University of Tsukuba
All papers (3399)
Updated at 2010-07-20 16:50:39
Updated at 2010-07-20 16:50:39
(view as: tree
,
cloud
)
1329 | untagged |
Materials
(111 tags)
219
286
89
24
36
851
26
238
183
139
Others(101 tags)
1
10
2
1
4
1
4
1
1
2
4
1
5
1
1
3
1
1
2
3
2
4
1
1
3
2
1
1
1
3
1
1
1
1
1
4
11
1
1
2
1
1
2
6
1
2
6
8
1
2
4
1
1
1
3
2
1
4
2
1
1
9
26
1
1
4
1
1
1
2
1
1
1
1
1
13
1
2
3
2
7
1
1
1
1
11
1
1
1
1
1
1
1
1
1
1
3
1
6
Technique
(46 tags)
19
7
67
71
1
118
1
33
1058
2
12
1
33
105
36
4
37
31
111
22
23
3
19
261
43
Details
(591 tags)
Bond(35 tags)
1
1
1
1
1
1
1
3
1
10
1
6
2
2
2
2
11
1
1
4
1
2
6
3
1
3
4
22
1
5
2
1
4
3
1
Defect(interstitial)(18 tags)
2
1
2
12
1
1
4
0
1
16
4
2
11
1
4
20
3
5
Defect-type(19 tags)
58
20
37
18
7
57
81
18
111
4
14
256
16
Element(65 tags)
18
9
20
4
56
1
2
131
8
12
12
15
16
7
6
15
15
24
10
4
11
142
7
0
30
4
20
51
1
6
1
7
85
4
165
57
8
3
1
0
4
234
4
5
2
2
1
3
4
4
16
24
Energy(8 tags)
15
52
35
24
14
10
7
Isotope(56 tags)
19
7
2
1
2
4
9
6
40
13
5
5
7
1
5
4
2
88
1
27
1
2
2
1
1
2
1
7
2
11
6
1
2
1
1
2
1
4
1
5
4
1
2
1
2
3
2
1
1
1
1
1
1
1
4
1
Label(303 tags)
2
1
5
1
2
3
4
2
3
2
1
1
2
1
1
1
5
1
1
1
4
1
2
2
1
1
1
1
1
1
1
2
1
3
3
2
2
1
2
1
1
1
1
1
1
4
1
1
2
16
2
4
4
3
2
7
3
1
1
1
1
34
3
37
1
3
2
5
8
5
3
5
2
3
2
1
1
1
1
2
2
1
1
1
1
1
1
2
2
2
1
1
17
1
22
1
1
12
2
1
5
3
3
2
2
1
5
7
7
1
3
2
4
1
1
2
2
3
3
1
0
3
3
1
1
2
2
2
3
1
2
2
1
2
3
1
5
1
2
1
1
1
2
12
6
1
1
1
1
2
2
1
1
2
5
3
1
1
3
4
2
2
1
1
1
1
2
3
1
1
1
1
1
1
2
2
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
1
1
1
1
3
1
1
1
1
1
1
1
1
1
1
1
4
3
4
1
9
1
2
1
2
3
6
5
5
2
2
1
5
12
1
2
1
35
29
23
2
1
1
1
1
1
2
8
1
1
1
1
1
1
1
1
1
1
1
1
1
3
1
4
3
2
5
1
3
3
2
2
9
2
2
1
2
1
1
1
0
2
1
7
1
1
1
1
4
5
2
10
4
2
1
2
3
1
8
1
1
1
1
1
2
1
1
11
Sample(17 tags)
132
98
113
134
5
0
198
11
160
9
65
Spin(8 tags)
3
13
Symmetry(15 tags)
8
9
16
2
9
25
3
7
3
4
12
9