Editing Log
.
Proc. SPIE 6020, 60203D (2005) ,
“Effect of radio frequency bias on the optical and structural properties of nanocrystalline SiC films deposited by helicon wave plasma enhanced chemical vapor deposition”, Wei Yu, Chunsheng Wang, Wanbing Lu, Shuangkui Cui, Guangsheng Fu
- last updated at 2006-03-08 22:23:13
- 2006-03-08 22:23:13 Tomoyo Inde, University of Tsukuba
- 2006-02-24 13:26:57 Tomoyo Inde, University of Tsukuba
Updated at 2010-07-20 16:50:39
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